DuPont’s polishing pad portfolio sets the standard for chemical mechanical planarization (CMP) in semiconductor manufacturing. Our wide range of hard and soft CMP pads are designed to meet the distinct needs of each different CMP application and technology node.
Our technical team supports customers with a robust understanding of CMP fundamentals, including product and process development capabilities. We can talk to you about what CMP pad will best meet your particular needs, including advanced technical performance, yield improvements and cost-of-ownership. We also welcome the opportunity to help enhance your overall process.
DuPont's offerings include several product families, all of which can meet the needs of multiple applications.
Our CMP pads cover a wide range of applications and technology nodes. For help understanding which technologies are well-suited for different CMP applications, please refer to the following chart.
Copper Bulk Polishing |
Ikonic™ 3040M, 4121H, 4250H Visionpad™ 6000, 7480, 9280 IC1000 |
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Copper Barrier Polishing |
Ikonic™ 2010H, 2020H, 2040H, 2060H Visionpad™ 3100, 3500 Optivision™ PRO 9500 |
Tungsten Polishing |
Ikonic™ 4250H, 4121H, 4141H Visionpad™ 5000 IC1000 |
STI /Ceria Polishing Applications |
Ikonic™ 4121H, 4140H, 4250H Visionpad™ 5000, 6000 IC1000 |
Oxide Polishing |
Visionpad™ 5000, 6000, 7480 IC1000 |
Buff Polishing |
Ikonic™ 2010H, 2020H, 2040H, 2060H Optivision™ 4540, 4548 Politex™, Politex™ AT IC1000 |
Broad portfolio of CMP pads to meet the needs of any application.
A range of offerings for chemical mechanical planarization (CMP) including Optiplane™, Acuplane™ and Klebosol® slurries.
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