The Optivision™ pad series for chemical mechanical planarization (CMP) is DuPont’s second generation soft pad that improves on the performance of Politex™ pads and is designed for improvements in cost of ownership.
Improved removal rate and defectivity compared to Politex™ polishing pads
Available on multiple substrates
Improved lifetime compared to Politex™
Applications:
Copper barrier, Buff, Polysilicon
What Materials do you need?
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