AR™ 137A-230 193nm ANTI-REFLECTANT

AR™ 137 Organic Bottom Anti-Reflectant Coating

AR137A-230 (GBF)/4 GA COR

Solutions

Anti-Reflectants & Functional Sublayers

Features & benefits

Excellent coating property

Good EBR/RRC solvent compatibiliy

Good compatibility with resist

High etch rate

Improves critical dimension uniformity (CDU)

Improves etch process margin

Improves lithographic process margins

Optimal n&k values for hyper NA exposure

Excellent coating property

Good EBR/RRC solvent compatibiliy

Good compatibility with resist

High etch rate

Improves critical dimension uniformity (CDU)

Improves etch process margin

Improves lithographic process margins

Optimal n&k values for hyper NA exposure

Available Sizes

Gross Weight	Net Weight	Carton Eacht	Carton Length	Carton Weight	Carton Height
		KAR	0	0	0

Product Details

Fabric/material	ARCS
Design	AR 137A-230 193nm ANTI-R
Seam	AR™ 137A-230 193nm ANTI-REFLECTANT
Packaging	ARCS
Hazard
Coated Material	ARCS
Features	ARCS

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