AR™ 10L is an organic, thermally cross-linking bottom anti-reflectant coating (BARC) for 248 nm (KrF) photoresists. It is designed to provide a universal anti-reflective surface for high- and low-temperature resist platforms and offers excellent compatibility with most ESCAP HYBRID and Acetal resists. AR™ 10L is a conformal 1st min., 248 nm anti-reflectant and is typically used in the range of 400-1200A over transparent thin films on reflective substrates.
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| Gross Weight | Net Weight | Carton Eacht | Carton Length | Carton Weight | Carton Height |
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| KAR | 0 | 0 | 0 |
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Fabric/material |
ARCS |
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Design |
AR 10L-400 DUV |
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Seam |
AR™ 10L-400 DUV ANTI-REFLECTANT |
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Packaging |
ARCS |
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Hazard |
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Coated Material |
ARCS |
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Features |
ARCS |