Wet Process

Excellent chemical resistance for all wet processes in chip fabrication

DuPont™ Kalrez® parts have excellent chemical resistance and have been specially formulated and processed to meet the harsh conditions of wet processes used in wafer processing environments. Plus, Kalrez® helps lower operation costs.

Kalrez® materials provide chemical resistance to achieve effective sealing in all wet process applications, including those using acids, bases, and amine-based strippers. Semiconductor manufacturers use it most often for:

• Wafer prep
• Etching
• Photolithography
• Stripping
• Copper plating

The low elemental extractables and good mechanical and compression set properties of Kalrez® means lower costs of operation for equipment using Kalrez® seals because of extended preventive maintenance cycles.

Kalrez® is well-suited for both static and dynamic wet process seal applications, including:

• Door and lid seals
• Drain seals
• Chemical container seals
• Fittings
• Filter seals
• Connector seals
• Flow meters

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